Finite-element Modeling of SAW-filters Based on Thin Films of Barium Strontium Titanate
UDC
538.9, 534.16DOI:
https://doi.org/10.31429/vestnik-17-4-48-56Abstract
Finite element modeling in COMSOL Multiphysics™ is carried out and the properties of surface acoustic waves frequency filters based on thin films are studied. The substrate is magnesium oxide MgO. A thin film of barium strontium titanate BaxTi1-xO3 (BST) is applied to the substrate. Two aluminum interdigital transducers are placed on the film. The nonlinear properties of the film lead to a change in the material constants of the linear equations of the piezoelectric effect. Therefore, the behavior of the material constants of BST single crystal thin films, depending on the magnitude of the forced deformation, is described on the basis of the Landau potential of the phenomenological theory. In this manuscript, the numerical results in the room temperature for barium titanate films in $c$-, $r$-, and $aa$-phases and BST80 in $c$-, and $aa$-phases are presented. Dependence of the reflection and transmission coefficients of the scattering matrix on the misfit strain of the film are determined. The material constants of the film under the misfit strain have extreme values at the phase boundaries and within the $r$-phase some elastic and electroelastic constants reach a maximum. The abnormal effect of the film on the characteristics of SAW-filters is obtained in these regions.
Keywords:
sourface acoustic waves, filters, ferroelectrics, material constants, finite-element modelingAcknowledgement
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Copyright (c) 2020 Timoshenko P.E., Shirokov V.B., Kalinchuk V.V.
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